HF and NOx removal process
Simultaneous scrubbing HF and de-NOx with SCR.
Click for more details of MIRAX.
|Item||Gas emitted from the semiconductor manufacturing business|
|Processing gas properties||Mixed exhaust gas including HF, HNO3, NOx|
|Processing gas flow rate||20,000 m³/h (NTP)|
|Operating time||24 hours continuous|
|Hazardous gas removal type||Alkaline scrubber and catalytic denitration|
|Residual heat utilization||Heat recovery from exhaust gas via a heat exchanger|
|Drainage flow rate||1,200 ℓ/h|
|Exhaust gas||NOx||99 % or more(Removal rate)|
|HF||1 ppm or less|
|NH3||10 ppm or less|
|Foot print||30 m × 15 m × 20 m H|