HF and Nox removal

Simultaneous scrubbing HF and de-NOx with SCR.


  • Low utility consumption by using residual heat of exhaust gas
  • Long lifetime catalyst by absorbing HF completely at scrubber
  • Compact scrubber size by using MIRAX( structured packing) provided by DEK
Click for more details of MIRAX.


Item Gas emitted from the semiconductor manufacturing business
Processing gas properties Mixed exhaust gas including HF, HNO3, NOx
Processing gas flow rate 20,000m3/h(NTP)
Operating time 24 hours continuous
Hazardous gas removal type Alkaline scrubber and catalytic denitration
Filler MIRAX FKP327
Residual heat utilization Heat recovery from exhaust gas via a heat exchanger
Drainage flow rate 1,200ℓ/h
Exhaust gas NOx 99% or more(Removal rate)
HF 1ppm or less
NH3 10ppm or less
Foot print 30m × 15m × 20mH

Equipment flow